Curriculum Vitae
Larry D. Hartsough, Ph.D.
UA Associates
3007 Benvenue Avenue
Berkeley, CA 94705
Ph: 510-548-5027 / Cell: 510-847-7033
Fax: 510-548-8109
Education
B.S., M.S., and Ph.D. in Materials Science/Engineering from the University of California, Berkeley
Professional Experience
1990- Present |
Consultant in private practice. dba UA Associates Product development projects; litigation support; film failure analysis; project management; technical presentations. |
1997- 2002 |
Manager, PVD Source Engineering Novellus Systems, Inc. Sputter hardware, target and process development. Thin film and component failure analysis. |
1991- 1997 |
Manager, PVD Source Technology Varian Associates, Thin Film Systems Division Development and improvement of advanced deposition sources and hardware. |
1988-1990 |
Project Manager General Signal Thinfilm Co. Design, engineer and build an advanced cluster tool. |
1984-1988 |
Manager, Advanced Development Gryphon Products, Inc. Develop enhancements for semiconductor fabrication equipment to enable advanced processes. |
1981-1984 |
VP Engineering & Founding Partner Gryphon Products/Exeltek, Inc. Cofounder and partner in startup company. Led engineering, prototyping and initial testing of sputtering system. |
1977-1981 |
Manager, Advanced Development; Manager, Applications Lab; Senior Staff Scientist Perkin-Elmer Corp., Plasma Products Division Development, characterization, demonstration and maintenance of sputter deposition equipment. |
1975-1977 |
Research Engineer Airco Temescal Characterization, process development and demonstration of a high throughput in-line sputter deposition system. |
1971-1975 |
Research Metallurgist Optical Coating Laboratory, Inc. Deposition processes and optical properties of thin films |
Professional Associations and Activities
- Member, American Vacuum Society since 1977
- Member, Sigma Xi, The Scientific Research Society, since 1971
- Leader in development of SEMI Standards for cluster tools and 300mm equipment:
- Co-Chair, first MESA task force on Utilities (electrical interconnect and EPO)(1989)
- Co-Chair, SEMI Standards E6 task force to revise Facilities Interface Specifications Format
- Co-Chair, SEMI Standards E15 task force to rewrite Load Port Interface Standard
- Technical Architect, SEMI Standards North America Physical Interfaces Committee
- North America Co-Chair, SEMI Standards Global Physical Interfaces and Carriers Committee
- Co-Chair, SEMI Standards North America Factory Integration Division (2003-2005)
- Member-at-Large, SEMI Standards North America Regional Standards Committee (2005-)
- Technical Editor, SEMI Standards North America Physical Interfaces Committee (2005-)
- Member of ASTM subcommittee F01.17 on Sputter Metallization
- Local Arrangements Chair - 1978 International Conference on Metallurgical Coatings
- Member of US Department of Commerce Semiconductor Technical Advisory Committee, 1980-84 (in re: Export Administration Act of 1979).