Areas of Expertise
- Semiconductor manufacturing equipment
- Physical metallurgy
- Thin film properties
- Thin film failure analysis
- Planar and hollow-cathode magnetron sputter source design
- SEMI Standards development and compliance
- Vacuum system design & practice
- Cluster tool design and interfaces
- PVD thin film process
- PVD process control
- Electrostatic chuck technology
- Magnetic modeling
- Ion source technologies
- Arc suppression
- Deposition shielding design
- Engineering management
- High voltage isolation
- Materials Science
- Process development (PVD)
- Project/program management
- Ultra-high vacuum materials and techniques