Expert Witness/Consultant
Semiconductor Manufacturing Equipment & Processes
Dr. Larry Hartsough has thirty years experience in the semiconductor capital equipment industry in the areas of thin film deposition, equipment design and plasma processing of materials. He was a pioneer in the development of magnetron sputtering hardware and processes for the metallization of silicon integrated circuits. Dr. Hartsough has been instrumental in the development of cluster tool and 300mm interface standards for semiconductor fabrication equipment.
Dr. Hartsough has filled executive, management and technical positions for a number of semiconductor equipment companies. He is named on twelve patents and has over 15 publications. Please see his Curriculum Vitae for additional information.
Through his consulting firm, U A Associates, Dr. Hartsough has provided technical expertise to manufacturing firms for the following:
- thin film failure analysis and process changes to correct cause
- technical response to RFQ for plasma processing equipment
- design & model magnetic confinement of glow discharges
- electrostatic chuck technology review
- develop advanced sputter cathode for magnetic materials
As an expert witness in intellectual property litigation, he has provided support in a variety of cases and technologies:
- infringement of a plasma confinement patent
- licensing action on a materials patent for submicron metallization
- licensing arbitration hearing for a wafer cooling patent
- mediation for a lapsed patent for an ion source apparatus
- misappropriation of trade secrets for thin film deposition equipment
- infringement of a patent for wafer metrology apparatus
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