Publications
G. C. D'Couto, G. Tkach, K. A. Ashtiani, L. Hartsough, E. Kim, R. Mulpuri, D. B. Lee, K. Levy, and M. Fissel; S. Choi, S.-M. Choi, H.-D. Lee, and H. -K. Kang, "In situ physical vapor deposition of ionized Ti and TiN thin films using hollow cathode magnetron plasma source" J. Vac. Sci. Technol. B 19(1) 244 (2001).
Larry D. Hartsough, "Electrostatic Wafer Holding", Solid State Technology, January 1993, p. 87.
D. R. Denison, L. D. Hartsough and S. Minners, "Characterization of an Aluminum Silicon Planarization Process in a Production Sputtering System", Microelectronic Manufacturing and Testing, November 1987, p. 6.
D. R. Denison and L. D. Hartsough, "Step Coverage in Multiple Pass Sputter Deposition" J. Vac. Sci. Technol., A3 686 (1985).
D. R. Denison and L. D. Hartsough, "Copper Distribution in Sputtered Al/Cu Films", J. Vac. Sci. Technol., 17 1326 (1980).
J. I. Steinfeld, T. G. Anderson, C. Reiser, D. R. Denison, L. D. Hartsough and J. R. Hollahan, "Surface Etching By laser-Generated Free Radicals", J. Electrochem. Soc., 127 (2) 514 (1980).
L. D. Hartsough, A. Koch, J. Moulder, and T. Sigmon, "Quantitative Analysis of Ti-W Films", J. Vac. Sci. Technol., 17 392 (1980).
A. Joshi, L. D. Hartsough and D. R. Denison, "Segregation Effects in Thin Films", Thin Solid Films, 64 409 (1979).
L. D. Hartsough, "Resistivity of Bias-Sputtered Ti-W Films", Thin Solid Films, 64 (1) 17 (1979).
L. D. Hartsough and D. R. Denison, "Aluminum and Aluminum Alloy Sputter Deposition for VLSI", Solid State Technology, December 1979, p. 66.
L.D. Hartsough, "Sputtered Oxides for Optical Coatings", presentation at Electro-Optics/Laser 77.
L. D. Hartsough and P. S. McLeod, "High-Rate Sputtering of Enhanced Aluminum Mirrors", J. Vac. Sci. Technol., 14 123 (1977).
P. S. McLeod and L. D. Hartsough, "High-Rate Sputtering of Aluminum for Metalization of Integrated Circuits", J. Vac. Sci. Technol., 14 263 (1977).
L. D. Hartsough, "Stability of A15 Phases", J. Phys. Chem. Solids 35 1691 (1974).
L. D. Hartsough and R. H. Hammond, "The Synthesis of Low Temperature Phases by the Co-Condensation of the Elements: A New Superconducting Compound, V3Al", Solid State Commun. 9 885 (1971).
L. D. Hartsough, V. F. Zackay and E. R. Parker, "High Field Characteristics of Nb3(Al,Ge)", Appl. Phys. Letts. 13 68 (1968).